IEC/TR 63258:2021
International Standard
Current Edition
·
Approved on
22 March 2021
Nanotechnologies — A guideline for ellipsometry application to evaluate the thickness of nanoscale films
IEC/TR 63258:2021 Files
English
16 Pages
Current Edition
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IEC/TR 63258:2021 Scope
IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.
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